Designs and Applications of Surface Acoustic Wave for Liquid Flow Sensing

Abstract
Surface acoustic wave (SAW) sensors have been one of active research interests for many decades. Responding for surface perturbation is its basic principle for sensing. Based on electrical and mechanical perturbation on the surface, it is popularly used in bio-sensing applications because of high sensitivity in the detection of fluid properties such as density, viscosity, streaming velocity in particular and liquid status in general. In our research, SAW sensors are analyzed and characterized to anticipate liquid density and status, improve sensitivity. Also, some specific structures are employed to measure density. For mechanical wave, it is most excited by density equals to 6 g/cm3 while for electrical signal, attenuation at 3 g/cm3 reaches a peak. It utilizes CMOS compatible materials, Aluminum Nitride (AlN) film on Silicon (Si) substrate, being suitable for inexpensive and reliable systems.

Speaker's biography:
Chu Duc Trinh received the B.S. degree in physics from Hanoi University of Science, Hanoi, Vietnam, in 1998, the M.Sc. degree in electrical engineering from Vietnam National University, Hanoi, in 2002, and the Ph.D. degree from Delft University of Technology, Delft, The Netherlands, in 2007. His doctoral research concerned piezoresistive sensors, polymeric actuators, sensing microgrippers for microparticle handling, and microsystems technology.
He is currently an Associate Professor with the Faculty of Electronics and Telecommunications, University of Engineering and Technology, Vietnam National University, Hanoi, Vietnam. Since 2008, he has been the Vice-Dean of the Faculty of Electronics and Telecommunications. He has been chair of Microelectromechanical Systems and Microsystems Department, since 2011. He has authored or coauthored more than 60 journal, conference papers and patents.
He was the recipient of the Vietnam National University, Hanoi, Vietnam Young Scientific Award in 2010, the 20th anniversary of DIMES, Delft University of Technology, The Netherlands Best Poster Award in 2007 and the 17th European Workshop on Micromechanics Best Poster Award in 2006. He is guest editor of the Special Issue of “Microelectromechanical systems,” Vietnam journal of Mechanics, ISSN: 0866 7136, vol. 34, no. 4, in 2012.